The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Sep. 15, 2021
Shibaura Mechatronics Corporation, Yokohama, JP;
Masaaki Furuya, Yokohama, JP;
SHIBAURA MECHATRONICS CORPORATION, Yokohama, JP;
Abstract
A substrate carrying apparatus that can reduce attachment of dust to substrates can be provided. The substrate carrying apparatusof the present embodiment includes a carrying armfor carrying a substrate, a columnstanding up from a base bodywith fixed angle, an upper linkwhich supports the carrying armat one end, which is rotatably connected to the column, and which moves the carrying armup and down in accordance with a rotation, a lower linkwhich is connected to be rotatable around an axis in parallel with a rotation axis of the upper linkas a center below a portion of the columnconnected to the upper link, a connection linkwhich is rotatably connected to the upper linkand the lower linkso that the upper linkrotates in accordance with a rotation of the lower link, and a driving unitwhich rotates the lower link