The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2024

Filed:

Apr. 24, 2020
Applicant:

The Regents of the University of California, Oakland, CA (US);

Inventors:

Steven Wolf, San Diego, CA (US);

Michael Breeden, San Diego, CA (US);

Ashay Anurag, La Jolla, CA (US);

Andrew Kummel, San Diego, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45527 (2013.01); C23C 16/02 (2013.01); H01L 21/02532 (2013.01); H01L 21/02554 (2013.01); H01L 21/0262 (2013.01); H01L 21/02658 (2013.01);
Abstract

The present inventive concept is related to methods for passivating an oxide layer and methods of selectively depositing a metal, metal nitride, metal oxide, or metal silicide layer on a metal, metal oxide, or silicide layer over an oxide layer including exposing the oxide layer to a passivant that selectively binds to the oxide layer over the metal, metal oxide, or silicide layer, and selectively growing the metal, metal nitride, metal oxide or metal silicide layer on the metal, metal oxide or silicide layer.


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