The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2024
Filed:
Aug. 11, 2021
Applicant:
Sandisk Technologies Llc, Addison, TX (US);
Inventors:
Assignee:
SANDISK TECHNOLOGIES LLC, Addison, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/532 (2006.01); H01L 21/768 (2006.01); H01L 23/522 (2006.01); H10B 41/27 (2023.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H01L 23/53219 (2013.01); H01L 21/76802 (2013.01); H01L 21/76877 (2013.01); H01L 21/76888 (2013.01); H01L 23/5226 (2013.01); H01L 23/53223 (2013.01); H10B 41/27 (2023.02); H10B 43/27 (2023.02);
Abstract
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers. The electrically conductive layers include an intermetallic alloy of aluminum and at least one metal other than aluminum. Memory openings vertically extend through the alternating stack. Memory opening fill structures are located in a respective one of the memory openings and include a respective vertical semiconductor channel and a respective vertical stack of memory elements.