The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2024
Filed:
Dec. 29, 2020
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Eric Eva, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
In order to reduce the degree of relaxation after an optical substrate has been compacted, in particular after a longer period, substrates () or reflective optical elements (), in particular for EUV lithography, with substrates () of this type, are proposed. These substrates (), which have a surface region () with a reflective coating (), are characterised in that, at least near to the surface region (), the titanium-doped quartz glass has a proportion of Si—O—O—Si bonds of at least 1*10/cmand/or a proportion of Si—Si bonds of at least 1*10/cmor, along a notional line () perpendicular to the surface region (), over a length () of 500 nm or more, a hydrogen content of more than 5×10molecules/cm.