The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2024
Filed:
Feb. 19, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Yukihiro Mori, Machida, JP;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B08B 7/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 7/0035 (2013.01); H01J 37/3244 (2013.01); H01L 21/67028 (2013.01);
Abstract
Examples of a system dedicated for parts cleaning includes a gas supply apparatus configured to supply a cleaning gas, a first adapter connected to a gas supply port of the gas supply apparatus, an exhaust system configured to exhaust the gas supplied from the gas supply apparatus, and a second adapter connected to a gas inlet of the exhaust system.
Mori, Yukihiro. (2024). System dedicated for parts cleaning (U.S. Patent No. 11986868). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11986868
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile