The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2024
Filed:
Nov. 03, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Job George Konnoth Joseph, Kerala, IN;
Sathya Swaroop Ganta, Sunnyvale, CA (US);
Kallol Bera, Fremont, CA (US);
Andrew Nguyen, San Jose, CA (US);
Jay D. Pinson, II, San Jose, CA (US);
Akshay Dhanakshirur, Hubli, IN;
Kaushik Comandoor Alayavalli, Sunnyvale, CA (US);
Canfeng Lai, Fremont, CA (US);
Ren-Guan Duan, Fremont, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Anil Kumar Kalal, Bengaluru, IN;
Abhishek Pandey, Buxar, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A plasma chamber includes a chamber body having a processing region therewithin, a liner disposed on the chamber body, the liner surrounding the processing region, a substrate support disposed within the liner, a magnet assembly comprising a plurality of magnets disposed around the liner, and a magnetic-material shield disposed around the liner, the magnetic-material shield encapsulating the processing region near the substrate support.