The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2024
Filed:
Jun. 10, 2020
Asml Netherlands B.v., Veldhoven, NL;
Mihaita Popinciuc, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method for determining a center of a radiation spot irradiated on a surface by a sensor, the sensor including a radiation source and a detector. The method includes: emitting, with the radiation source, a first emitted radiation beam onto the surface to create the radiation spot on the surface, wherein at least a part of a target arranged at the surface is irradiated by the radiation spot; receiving, with the detector, a first reflected radiation beam at least including radiation from the radiation spot reflected by the target; detecting the presence of the target based on the first reflected radiation beam; determining a first measured position of the target based on the first reflected radiation beam; and determining a center of the radiation spot as projected on the surface in at least a first direction based on the first measured position of the target.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile