The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2024

Filed:

Oct. 19, 2020
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Marc Venet, Natick, MA (US);

Jürgen M. Lobert, Franklin, MA (US);

John C. Gaudreau, Chepachet, RI (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/34 (2006.01); B01D 46/00 (2022.01); B01D 46/44 (2006.01); B01D 46/62 (2022.01); B01D 46/88 (2022.01); B01D 53/04 (2006.01); B01D 53/72 (2006.01); B01D 53/75 (2006.01); B01D 53/82 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B01D 53/346 (2013.01); B01D 46/0086 (2013.01); B01D 46/44 (2013.01); B01D 46/62 (2022.01); B01D 46/88 (2022.01); B01D 53/0454 (2013.01); B01D 53/72 (2013.01); B01D 53/75 (2013.01); B01D 53/82 (2013.01); G03F 7/70908 (2013.01); G03F 7/70991 (2013.01); B01D 2257/406 (2013.01); B01D 2257/702 (2013.01); B01D 2257/7022 (2013.01); B01D 2257/7027 (2013.01); B01D 2259/40084 (2013.01); B01D 2259/41 (2013.01); B01D 2259/4146 (2013.01); B01D 2259/4148 (2013.01);
Abstract

System and method for removing molecular contaminants from an air stream are disclosed. The system includes first, second and third filter. The first filter removes organic contaminants from an air stream passing through the first filter. The second filter is downstream of the first filter, is physically and chemically exchangeable with the first filter and removes organic contaminants from the air stream output of the first filter. The third filter, downstream of the second filter, is not exchangeable with the first filter or the second filter. The first position filter can be replaced by the second filter in the second position when the first filter in the first position becomes depleted as detected. A new filter in the second filter position is inserted. Replacing the depleted first filter with the second downstream filter reduces costs and waste while inserting the new filter in the second position ensures removing organic contaminants.


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