The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2024

Filed:

Jan. 25, 2022
Applicant:

Synopsys, Inc., Mountain View, CA (US);

Inventors:

Yung-Yu Chen, Hsinchu, TW;

Lun-Wen Yeh, Tainan, TW;

Assignee:

Synopsys, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/36 (2012.01); G03F 1/70 (2012.01);
U.S. Cl.
CPC ...
G03F 1/36 (2013.01); G03F 1/70 (2013.01);
Abstract

In some aspects, a mask shape is represented by vertices that are connected by segments. A correction to the mask shape is received. The correction may include displacements of the segments and displacements of the vertices. The mask shape is modified by a processor, as follows. The segments are moved according to the segment displacements. As part of this process, vertices that are endpoints of the moved segments are replicated. The replicated vertices are then collapsed. The resulting vertices are then moved according to the vertex displacements. This process of modifying the mask shape may be used as part of a mask synthesis process, to synthesize or correct the mask shapes according to some desired result.


Find Patent Forward Citations

Chen, Yung-Yu. (2024). Modifying segments and vertices of mask shapes for mask synthesis (U.S. Patent No. 11977324). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11977324

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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