The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2024
Filed:
Mar. 11, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Kenichi Ohno, Sunnyvale, CA (US);
Andrew Ceballos, Palo Alto, CA (US);
Karl J. Armstrong, Sunnyvale, CA (US);
Takashi Kuratomi, San Jose, CA (US);
Rami Hourani, Santa Clara, CA (US);
Ludovic Godet, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An optical device is provided. The optical device includes an optical device substrate having a first surface; and an optical device film disposed over the first surface of the optical device substrate. The optical device film is formed of titanium oxide. The titanium oxide is selected from the group of titanium(IV) oxide (TiO), titanium monoxide (TiO), dititanium trioxide (TiO), TiO, TiO, δ-TiO, where x is 0.68 to 0.75, and TiO, where n is 3 to 9, the optical device film has a refractive index greater than 2.72 at a 520 nanometer (nm) wavelength, and a rutile phase of the titanium oxide comprises greater than 94 percent of the optical device film.