The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2024

Filed:

Jan. 05, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Alexia Adilene Portillo Rivera, Santa Clara, CA (US);

Andrew Ceballos, Santa Clara, CA (US);

Kenichi Ohno, Sunnyvale, CA (US);

Rami Hourani, Santa Clara, CA (US);

Karl J. Armstrong, Sunnyvale, CA (US);

Brian Alexander Cohen, Delmar, NY (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 17/36 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C03C 17/3615 (2013.01); C03C 17/3626 (2013.01); C03C 17/3642 (2013.01); C03C 17/3644 (2013.01); C03C 17/3663 (2013.01); C23C 14/0652 (2013.01); C23C 14/08 (2013.01); C23C 14/18 (2013.01); C23C 14/3407 (2013.01); C03C 2218/154 (2013.01);
Abstract

Embodiments of the present disclosure generally relate to encapsulated optical devices and methods for fabricating the encapsulated optical devices. In one or more embodiments, a method for encapsulating an optical device includes depositing a metallic silver layer on a substrate, depositing a barrier layer on the metallic silver layer, where the barrier layer contains silicon nitride, a metallic element, a metal nitride, or any combination thereof, and depositing an encapsulation layer containing silicon oxide on the barrier layer.


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