The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2024

Filed:

Dec. 31, 2021
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Christopher Thompson, Hillsboro, OR (US);

Dustin Ellis, Hillsboro, OR (US);

Adam Stokes, Hillsboro, OR (US);

Ronald Kelley, Hillsboro, OR (US);

Cedric Bouchet-Marquis, Hillsboro, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/305 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3056 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/208 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/31749 (2013.01);
Abstract

Methods and systems for creating attachments between a sample manipulator and a sample within a charged particle systems are disclosed herein. Methods include translating a sample manipulator so that it is proximate to a sample, and milling portions of the sample manipulator such that portions are removed. The portion of the sample manipulator proximate to the sample is composed of a high sputter yield material, and the high sputter yield material may be the material milled with the charged particle beam such that it is removed from the sample manipulator. According to the present disclosure, the portions of the sample manipulator are milled such that at least some of the removed high sputter yield material redeposits to form an attachment between the sample manipulator and the sample.


Find Patent Forward Citations

Thompson, Christopher. (2024). Systems and methods for performing sample lift-out for highly reactive materials (U.S. Patent No. 11972923). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11972923

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…