The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 30, 2024

Filed:

Apr. 21, 2020
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Hideo Akiba, Utsunomiya, JP;

Kyohei Ishikawa, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); G02B 1/115 (2015.01);
U.S. Cl.
CPC ...
G02B 1/115 (2013.01); C23C 14/0036 (2013.01); C23C 14/0694 (2013.01); C23C 14/08 (2013.01); C23C 14/18 (2013.01); C23C 14/3464 (2013.01);
Abstract

An optical device includes, in sequence, a surface formed of a metal oxide, a samarium oxide-containing layer in contact with the surface formed of a metal oxide, and a magnesium fluoride-containing layer in contact with the samarium oxide-containing layer so as to suppress optical absorption resulting from high-rate sputter deposition of a magnesium fluoride-containing layer on a surface formed of a metal oxide.


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