The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2024
Filed:
Jan. 17, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Ivo Johannes Raaijmakers, Amersfoort, NL;
Jan Willem Maes, Wilrijk, BE;
Werner Knaepen, Leuven, BE;
Krzysztof Kamil Kachel, Heverlee, BE;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/04 (2006.01); C23C 16/44 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); G03F 7/20 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
C23C 16/045 (2013.01); C23C 16/4408 (2013.01); C23C 16/4412 (2013.01); C23C 16/4485 (2013.01); C23C 16/45523 (2013.01); C23C 16/45527 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); G03F 7/2004 (2013.01); H01L 21/02205 (2013.01); H01L 21/0228 (2013.01); H01L 21/0332 (2013.01); H01L 21/0337 (2013.01); H01L 21/0273 (2013.01);
Abstract
Examples of the disclosure relate to a sequential infiltration synthesis apparatus comprising: