The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2024
Filed:
Aug. 08, 2018
Sumitomo Chemical Company, Limited, Tokyo, JP;
Fumimasa Horikiri, Hitachi, JP;
Takehiro Yoshida, Hitachi, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
A nitride semiconductor substrate including a group III nitride semiconductor crystal and having a main surface, wherein a low index crystal plane is (0001) plane curved in a concave spherical shape to the main surface, and the off-angle (θ, θ) at a position (x, y) in the main surface approximated by x representing a coordinate in a direction along <1-100> axis, y is a coordinate in a direction along <11-20> axis, (0, 0) represents a coordinate (x, y) of the center, θrepresents a direction component along <1-100> axis in an off-angle of <0001> axis with respect to a normal, θrepresents a direction component along <11-20> axis in the off-angle, (M, A) represents a rate of change in the off-angle (θ, θ) with respect to the position (x, y) in the main surface, and (M, A) represents the off-angle (θ, θ) at the center.