The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2024
Filed:
Jun. 23, 2022
Applicant:
Jsr Corporation, Tokyo, JP;
Inventor:
Ryuichi Nemoto, Tokyo, JP;
Assignee:
JSR CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/029 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); G03F 7/0048 (2013.01); G03F 7/0295 (2013.01); G03F 7/0392 (2013.01); G03F 7/2002 (2013.01); G03F 7/30 (2013.01);
Abstract
A radiation-sensitive resin composition includes: an onium salt compound represented by formula (1′); a resin including a structural unit having an acid-dissociable group; and a solvent. Eis a substituted or unsubstituted (α+β)-valent organic group having 1 to 40 carbon atoms; Zis a monovalent radiation-sensitive onium cation; and α and β are each independently 1 or 2.