The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2024
Filed:
Sep. 09, 2021
Applicant:
Changxin Memory Technologies, Inc., Hefei, CN;
Inventor:
Ping-Heng Wu, Hefei, CN;
Assignee:
Changxin Memory Technologies, Inc., Hefei, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5222 (2013.01); H01L 28/75 (2013.01);
Abstract
A semiconductor structure and a method for manufacturing a semiconductor structure are provided. The semiconductor structure includes at least two electrode layers, and the electrode layers are parallel to each other and arranged in different layers. Adjacent electrode layers overlap with each other and have an overlapping area, a dielectric layer is arranged between the adjacent electrode layers, and an air gap is arranged in the dielectric layer located in the overlapping area.