The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2024

Filed:

Feb. 08, 2021
Applicant:

Kla Corporation, Milpitas, CA (US);

Inventor:

Bjorn Brauer, Beaverton, OR (US);

Assignee:

KLA Corp., Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G06N 3/045 (2023.01); G06N 3/088 (2023.01); G06N 20/00 (2019.01);
U.S. Cl.
CPC ...
G06T 7/0006 (2013.01); G06N 3/045 (2023.01); G06N 3/088 (2013.01); G06N 20/00 (2019.01); G06T 2207/10061 (2013.01); G06T 2207/10152 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01);
Abstract

Methods and systems for generating a simulated image for a specimen are provided. One system includes one or more computer subsystems and one or more components executed by the one or more computer subsystems. The one or more components include a generative adversarial network (GAN), e.g., a conditional GAN (cGAN), trained with a training set that includes portions of design data for one or more specimens designated as training inputs and corresponding images of the one or more specimens designated as training outputs. The one or more computer subsystems are configured for generating a simulated image for a specimen by inputting a portion of design data for the specimen into the GAN.


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