The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2024
Filed:
Sep. 19, 2019
Asml Netherlands B.v., Veldhoven, NL;
Vahid Mohammadi, Eindhoven, NL;
Yassin Chowdhury, Geldrop, NL;
Pieter Cristiaan De Groot, Heeze, NL;
Wouter Joep Engelen, Eindhoven, NL;
Marcel Johannes Petrus Theodorus Van Der Hoorn, Antwerp, BE;
ASML NETHERLANDS B. V., Veldhoven, NL;
Abstract
A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.