The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2024

Filed:

Apr. 08, 2022
Applicant:

Orbotech Ltd., Yavne, IL;

Inventor:

Robert Barnett, San Jose, CA (US);

Assignee:

Orbotech Ltd., Yavne, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); B08B 5/02 (2006.01); B08B 13/00 (2006.01); G01B 11/00 (2006.01); G01R 31/28 (2006.01); G01R 31/308 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2881 (2013.01); B08B 5/02 (2013.01); B08B 13/00 (2013.01); G01B 11/002 (2013.01); G01R 31/308 (2013.01);
Abstract

A system including a modulator, a laser source, a mirror, a laser sensor, and a processor. The modulator is movable in a first direction. The laser source is configured to emit laser light in a direction parallel to the surface of the modulator. The mirror is configured to redirect the laser light. The laser sensor is configured to detect a first change in intensity when a particle on the surface of the modulator passes through the laser light emitted by the laser source. The laser sensor is further configured to detect a second change in intensity when the particle on the surface of the modulator passes through the laser light redirected by the at least one mirror. The processor is configured to determine an X-Y location of the particle based on the first change in intensity and the second change in intensity.


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