The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2024
Filed:
Feb. 03, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Xiaopu Li, San Jose, CA (US);
Kallol Bera, San Jose, CA (US);
Yaoling Pan, San Jose, CA (US);
Kelvin Chan, San Ramon, CA (US);
Amir Bayati, Santa Clara, CA (US);
Philip Allan Kraus, San Jose, CA (US);
Kenric T. Choi, Santa Clara, CA (US);
William John Durand, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.