The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Nov. 05, 2019
Asml Netherlands B.v., Veldhoven, NL;
Thomas Poiesz, Veldhoven, NL;
Michel Ben Isel Habets, Eindhoven, NL;
Abraham Alexander Soethoudt, Eindhoven, NL;
Herman Marquart, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention provides a testing substrate (W) for estimating stress in production substrates due to a substrate support, said testing substrate having a support surface (SS) divided into predefined portions, wherein the predefined portions comprise at least one first portion () having a first coefficient of friction being substantially uniform across the at least one first portion, and at least one second portion () having a second coefficient of friction being substantially uniform across the at least one second portion, wherein the second coefficient of friction is different to the first coefficient of friction. The present invention also provides a method for estimating stress in a substrate due to a substrate support and a system for making such an estimation.