The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Sep. 29, 2020
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Manchao Xiao, San Diego, CA (US);
Matthew R. MacDonald, Laguna Niguel, CA (US);
Xinjian Lei, Vista, CA (US);
Meiliang Wang, San Marcos, CA (US);
Assignee:
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 77/26 (2006.01); C07F 7/10 (2006.01); C07F 7/18 (2006.01); C07F 7/21 (2006.01); C08G 77/04 (2006.01); C08G 77/06 (2006.01); C08L 83/08 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C08G 77/26 (2013.01); C07F 7/10 (2013.01); C07F 7/1888 (2013.01); C07F 7/21 (2013.01); C08G 77/045 (2013.01); C08G 77/06 (2013.01); C08L 83/08 (2013.01); C23C 16/401 (2013.01); C23C 16/45527 (2013.01); C23C 16/45553 (2013.01); C08G 2390/40 (2013.01);
Abstract
Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized linear and cyclic oligosiloxanes are also disclosed.