The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 02, 2024

Filed:

Feb. 18, 2022
Applicant:

Qualcomm Technologies Inc., San Diego, CA (US);

Inventors:

Karl Grosh, Ann Arbor, MI (US);

Robert J. Littrell, Boston, MA (US);

Assignee:

QUALCOMM Technologies, Inc., San Diego, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 17/02 (2006.01); H01L 41/27 (2013.01); H01L 41/314 (2013.01); H01L 41/332 (2013.01); H04R 7/06 (2006.01); H04R 31/00 (2006.01); H10N 30/05 (2023.01); H10N 30/074 (2023.01); H10N 30/082 (2023.01);
U.S. Cl.
CPC ...
H04R 17/02 (2013.01); H04R 7/06 (2013.01); H04R 31/003 (2013.01); H10N 30/05 (2023.02); H10N 30/074 (2023.02); H10N 30/082 (2023.02); H04R 17/025 (2013.01); H04R 31/00 (2013.01); H04R 2201/003 (2013.01); H04R 2410/03 (2013.01);
Abstract

A transducer of the preferred embodiment including a transducer and a plurality of adjacent, tapered cantilevered beams. Each of the beams define a beam base, a beam tip, and a beam body disposed between the beam base and the beam tip. The beams are arranged such that each of the beam tips extends toward a common area. Each beam is joined to the substrate along the beam base and is free from the substrate along the beam body. A preferred method of manufacturing a transducer can include: depositing alternating layers of piezoelectric and electrode onto the substrate in block, processing the deposited layers to define cantilever geometry in block, depositing metal traces in block, and releasing the cantilevered beams from the substrate in block.


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