The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Feb. 24, 2022
Tokyo Electron Limited, Tokyo, JP;
Dongwei Li, Nirasaki, JP;
Takehiro Shindo, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate transfer device includes: a planar motor provided in a transfer chamber and including an array of coils, a transfer unit configured to move above the planar motor, and a controller configured to control supply of a current to the array of the coils, wherein the transfer unit includes a first base including an array of first magnets and configured to move above the planar motor, a second base including an array of second magnets and configured to move above the planar motor, the second base being arranged coaxially with the first base, and at least one arm configured to be extended or contracted by rotating the second base relative to the first base.