The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Feb. 16, 2021
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Umesh Adiga, Hillsboro, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/00 (2006.01); G06N 3/04 (2023.01); G06N 7/00 (2023.01); G06N 7/01 (2023.01); G06N 20/00 (2019.01); G06T 7/00 (2017.01); G06T 7/11 (2017.01); G06T 7/12 (2017.01);
U.S. Cl.
CPC ...
G03F 7/70666 (2013.01); G03F 7/70091 (2013.01); G06N 3/04 (2013.01); G06N 7/01 (2023.01); G06N 20/00 (2019.01); G06T 7/0004 (2013.01); G06T 7/11 (2017.01); G06T 7/12 (2017.01); G06T 2207/10061 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Apparatuses and methods for metrology on devices using fast marching level sets are disclosed herein. An example method at least includes initiating a fast marching level set seed on an image, propagating a fast marching level set curve from the fast marching level set seed to locate boundaries of a plurality of regions of interest within the image, and performing metrology on the regions of interest based in part on the boundaries.