The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Nov. 08, 2021
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Dirk Seidel, Jena-Leutra, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 7/28 (2021.01); G02B 21/24 (2006.01); G03F 1/70 (2012.01); G03F 9/00 (2006.01); H04N 23/67 (2023.01);
U.S. Cl.
CPC ...
G02B 7/28 (2013.01); G02B 21/244 (2013.01); G03F 1/70 (2013.01); G03F 9/7026 (2013.01); H04N 23/671 (2023.01);
Abstract
The invention relates to an autofocusing method for an imaging device (for semiconductor lithography) comprising an imaging optical unit, an object to be measured and an autofocusing device having a reflective illumination, comprising the following method steps: