The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Oct. 05, 2020
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Philipp Huebner, Hamburg, DE;
Stefan Richter, Jena, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/07 (2006.01); G01R 1/073 (2006.01); G01R 31/311 (2006.01); G02B 6/26 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G01R 1/071 (2013.01); G01R 1/073 (2013.01); G01R 31/311 (2013.01); G02B 6/26 (2013.01); G02B 26/0816 (2013.01);
Abstract
An electro-optical circuit board can provide probe card functionality. The electro-optical circuit board includes at least one electrical conductor track and at least one optical beam path.