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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11945074 B1

PDFFull Text
Date of Patent:
Apr. 02, 2024

Filed:

Feb. 03, 2021

Processing apparatus

Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Nobuyuki Fukushi, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain Ltd.

Primary Examiner:

Eric J Rosen

Assistant Examiner:

Sharonda T Felton

Int. Cl.
CPC ...
B24B 49/04 (2006.01); B24B 5/02 (2006.01); B24B 5/313 (2006.01); B24B 7/22 (2006.01); B24B 51/00 (2006.01); H01L 21/304 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B24B 49/04 (2013.01); B24B 5/02 (2013.01); B24B 5/313 (2013.01); B24B 7/22 (2013.01); B24B 51/00 (2013.01); H01L 21/304 (2013.01); H01L 21/68707 (2013.01); H01L 21/68714 (2013.01);
Abstract

A processing apparatus includes a chuck table for holding a workpiece that has a mark representing a crystal orientation, a processing unit, a cassette stage for placing thereon a cassette for storing a plurality of workpieces therein, a temporary rest table, a spinner table, a robot for delivering a workpiece, a determining section for determining whether a workpiece has been properly processed or has not been properly processed, and a control unit for performing a control process for orienting the mark of the workpiece in a predetermined direction if the determining section determines that the workpiece has been properly processed and storing the workpiece in the cassette, and performing a control process for orienting the mark of the workpiece in a direction different from the predetermined direction if the determining section determines that the workpiece has not been properly processed and storing the workpiece in the cassette.

Find Patent Forward Citations

Fukushi, Nobuyuki. (2024). Processing apparatus (U.S. Patent No. 11945074). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11945074

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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