The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2024

Filed:

Feb. 18, 2021
Applicants:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Toshiba Materials Co., Ltd., Yokohama, JP;

Inventors:

Kuniyuki Kakushima, Yokohama Kanagawa, JP;

Akito Sasaki, Yokohama Kanagawa, JP;

Atsuya Sasaki, Yokohama Kanagawa, JP;

Hideaki Hirabayashi, Yokohama Kanagawa, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); G01T 1/24 (2006.01); H01L 31/0224 (2006.01); H01L 31/028 (2006.01); H01L 31/0296 (2006.01); H01L 31/0304 (2006.01); H01L 31/0312 (2006.01); H01L 31/032 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14607 (2013.01); G01T 1/241 (2013.01); H01L 27/14659 (2013.01); H01L 31/022408 (2013.01); H01L 31/028 (2013.01); H01L 31/0296 (2013.01); H01L 31/0304 (2013.01); H01L 31/03044 (2013.01); H01L 31/0312 (2013.01); H01L 31/032 (2013.01);
Abstract

A photon counting radiation detector includes a cell structure including a substrate and an epitaxial layer provided on the substrate, radiation being incident on the epitaxial layer; an inclination θ of the substrate being set in a predetermined range, where tis a thickness of the substrate, tis a thickness of the epitaxial layer, L is a length of the substrate, and the inclination θ is an inclination of the substrate with respect to an incident direction of the radiation. The epitaxial layer is preferably one type selected from SiC, GaO, GaAs, GaN, diamond, and CdTe. Such a photon counting radiation detector is preferably a direct converting type.


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