The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Dec. 17, 2019
Asml Netherlands B.v., Veldhoven, NL;
Arno Jan Bleeker, Westerhoven, NL;
Pieter Willem Herman De Jager, Middelbeers, NL;
Maikel Robert Goosen, Eindhoven, NL;
Erwin Paul Smakman, Eindhoven, NL;
Albertus Victor Gerardus Mangnus, Eindhoven, NL;
Yan Ren, Eindhoven, NL;
Adam Lassise, Den Bosch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Apparatuses and methods for charged-particle detection may include a deflector system configured to direct charged-particle pulses, a detector having a detection element configured to detect the charged-particle pulses, and a controller having a circuitry configured to control the deflector system to direct a first and second charged-particle pulses to the detection element; obtain first and second timestamps associated with when the first charged-particle pulse is directed by the deflector system and detected by the detection element, respectively, and third and fourth timestamps associated with when the second charged-particle pulse is directed by the deflector system and detected by the detection element, respectively; and identify a first and second exiting beams based on the first and second timestamps, and the third and fourth timestamps, respectively.