The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2024

Filed:

Aug. 31, 2023
Applicant:

Tokyo Seimitsu Co., Ltd., Hachioji, JP;

Inventors:

Natsumi Hayashi, Tsuchiura, JP;

Hideki Morii, Tsuchiura, JP;

Tetsuo Yoshida, Tokyo, JP;

Toshiyuki Kimura, Tokyo, JP;

Assignee:

TOKYO SEIMITSU CO., LTD., Hachioji, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 1/06711 (2013.01); G01R 1/07314 (2013.01);
Abstract

The particle measurement device includes: an acquiring unit configured to acquire pad surface shape data indicating a surface shape of an electrode pad including a probe needle mark where a probe needle has contacted; a roughness calculating unit configured to calculate volume of a recessed portion recessed from a pad reference surface and volume of a protruding portion protruding from the pad reference surface based on the pad surface shape data; and a particle quantity calculating unit configured to calculate a particle quantity from a volume difference between the volume of the recessed portion and the volume of the protruding portion.


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