The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Jun. 08, 2021
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventor:
Junhua Ding, Boxborough, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/86 (2006.01); G01F 1/37 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
G01F 1/372 (2013.01); G01F 1/86 (2013.01); G05D 7/0652 (2013.01);
Abstract
A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.