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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11935797 B1

PDFFull Text
Date of Patent:
Mar. 19, 2024

Filed:

Oct. 27, 2021

Test method, adjustment method, test system, and storage medium for alignment error

Applicant:

Changxin Memory Technologies, Inc., Hefei, CN;

Inventor:

Xiaodong Luo, Hefei, CN;

Assignee:

CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;

Attorneys:

Syncoda LLC

Feng Ma

Primary Examiner:

Jermele M Hollington

Assistant Examiner:

Courtney G McDonnough

Int. Cl.
CPC ...
G01R 31/26 (2020.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01R 31/2601 (2013.01);
Abstract

A test method for an alignment error includes: providing a substrate, wherein a first conductive layer and a second conductive layer are arranged on the substrate at intervals, and the first conductive layer and the second conductive layer are arranged in a first direction; acquiring a first distance; acquiring a first resistance of the first conductive layer and a second resistance of the second conductive layer; acquiring an actual distance between the first conductive layer and the second conductive layer according to the first distance, the first resistance, and the second resistance; and acquiring a value of the alignment error between the first conductive layer and the second conductive layer based on the actual distance and a standard distance between the first conductive layer and the second conductive layer.

Find Patent Forward Citations

Luo, Xiaodong. (2024). Test method, adjustment method, test system, and storage medium for alignment error (U.S. Patent No. 11935797). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11935797

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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