The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Aug. 27, 2021
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventors:
Fang-Pin Chiang, Taichung, TW;
Tsung-Lin Tsai, Tainan, TW;
Chaoyen Huang, Hsinchu, TW;
Yi Chuan Chen, Hsinchu, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B67D 7/34 (2010.01); B65B 57/02 (2006.01); B67C 3/26 (2006.01); B67D 7/02 (2010.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6715 (2013.01); B65B 57/02 (2013.01); B67C 3/2637 (2013.01); B67D 7/0272 (2013.01); B67D 7/0288 (2013.01); B67D 7/348 (2013.01);
Abstract
The present disclosure provides a chemical supply system, including a chamber, a tubing extending into the chamber, an interlock apparatus, including a fixture for fastening the tubing, and means for determining whether the tubing is fastened by the fixture.