The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Feb. 01, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Thomas H. Osterheld, Mountain View, CA (US);
Dominic J. Benvegnu, La Honda, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 49/12 (2006.01); B24B 37/013 (2012.01); B24B 37/04 (2012.01); B24B 53/017 (2012.01); G06N 3/084 (2023.01);
U.S. Cl.
CPC ...
B24B 49/12 (2013.01); B24B 37/013 (2013.01); B24B 37/04 (2013.01); B24B 53/017 (2013.01); G06N 3/084 (2013.01);
Abstract
A polishing apparatus includes a polishing station to hold a polishing pad, a carrier head to hold a substrate in contact with a polishing pad at the polishing station, a camera positioned to capture an image of a lower surface of a consumable part when the consumable part moves away from the polishing pad, and a controller configured to perform an image processing algorithm on the image to determine whether the consumable part is damaged. The consumable part can be a retaining ring on a carrier head, or a conditioner disk on a conditioner head.