The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2024
Filed:
Dec. 19, 2017
Applicant:
Basf SE, Ludwigshafen am Rhein, DE;
Inventors:
Marcel Patrik Kienle, Limburgerhof, DE;
Dieter Mayer, Ludwigshafen, DE;
Marco Arnold, Ludwigshafen, DE;
Alexandra Haag, Ludwigshafen, DE;
Charlotte Emnet, Ludwigshafen, DE;
Alexander Fluegel, Ludwigshafen, DE;
Assignee:
BASF SE, Ludwigshafen am Rhein, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 3/32 (2006.01); C25D 3/02 (2006.01); C25D 3/38 (2006.01); C25D 7/12 (2006.01); H01L 21/288 (2006.01);
U.S. Cl.
CPC ...
C25D 3/32 (2013.01); C25D 3/02 (2013.01); C25D 3/38 (2013.01); C25D 7/123 (2013.01); H01L 21/2885 (2013.01);
Abstract
The invention relates to a polyamine-based or polyhydric alcohol-based suppressing agent. The suppressing agent is modified by reaction with a compound that introduces a branching group into the suppressing agent before they are reacted with an alkylene oxide. The suppressing agent shows extraordinary superfilling properties, particularly when used to fill in features having extremely small aperture sizes and/or high aspect ratios.