The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 12, 2024

Filed:

Mar. 13, 2020
Applicant:

Nanofilm Technologies International Limited, Singapore, SG;

Inventors:

Xu Shi, Singapore, SG;

Ming Chu Yang, Singapore, SG;

Kok How Tan, Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/14 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/325 (2013.01); C23C 14/0605 (2013.01); C23C 14/14 (2013.01); H01J 37/32055 (2013.01); H01J 2237/332 (2013.01);
Abstract

A cathode arc source comprises: a cathode target; a first magnetic field source located above the target; a second magnetic field source located below the target; and a third magnetic field source located between the first and second magnetic field sources and having an opposite polarity to the first magnetic field source; wherein the resultant magnetic field from the first, second and third magnetic field sources has zero field strength in a direction substantially normal to the target at a position above the target. The invention also provides methods of striking a cathode target and methods of depositing coatings which can be carried out using the cathode arc source described herein.


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