The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Feb. 25, 2022
Kioxia Corporation, Tokyo, JP;
Yoshihiro Uozumi, Aichi-ken, JP;
Shinsuke Kimura, Mie-ken, JP;
Yoshihiro Ogawa, Mie-ken, JP;
Hiroyasu Iimori, Mie-ken, JP;
Tatsuhiko Koide, Mie-ken, JP;
Hideaki Hirabayashi, Kanagawa-ken, JP;
Yuji Nagashima, Kanagawa-ken, JP;
Kioxia Corporation, Tokyo, JP;
Abstract
According to one embodiment, a substrate processing method is disclosed. The method can include treating a substrate with a first liquid. The substrate has a structural body formed on a major surface of the substrate. The method can include forming a support member supporting the structural body by bringing a second liquid into contact with the substrate wetted by the first liquid, and changing at least a portion of the second liquid into a solid by carrying out at least one of causing the second liquid to react, reducing a quantity of a solvent included in the second liquid, and causing at least a portion of a substance dissolved in the second liquid to be separated. The method can include removing the support member by changing at least a part of the support member from a solid phase to a gaseous phase, without passing through a liquid phase.