The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Sep. 09, 2020
Disco Corporation, Tokyo, JP;
Keiji Nomaru, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A measuring apparatus for measuring positional relation between a chuck table for holding a workpiece thereon and a processing tool for processing the workpiece held on the chuck table. The measuring apparatus includes a broadband light source, a mirror for reflecting light emitted from the broadband light source to travel toward the processing tool, a chromatic aberration condensing lens disposed between the broadband light source and the mirror or between the mirror and the processing tool, a light branching unit branching reflected light from the processing tool that has been reflected by the mirror and traveled back through the chromatic aberration condensing lens, and a position detecting unit detecting the position of the processing tool on the basis of intensity of the reflected light that corresponds to a wavelength of the reflected light branched by the light branching unit.