The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Apr. 10, 2020
Applicants:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Tsmc Nanjing Company, Limited, Nanjing, CN;
Inventors:
Assignees:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
TSMC NANJING COMPANY, LIMITED, Nanjing, CN;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 19/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B01D 19/0042 (2013.01); B01D 19/0021 (2013.01); G03F 7/70858 (2013.01);
Abstract
A de-bubbling slide is configured to fit in a dispensing vessel and capture, with a receiving element, a flow of fluid into the dispensing vessel from a fluid inlet. The receiving element of the de-bubbling slide directs the flow of fluid to a flow surface of the de-bubbling slide from which gas dissolved in the flow of fluid, or bubbles in the flow of fluid, escape from the fluid. Openings in an upper surface of the de-bubbling slide allow the escaped gas to exit the de-bubbling slide.