logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11916132 B1

PDFFull Text
Date of Patent:
Feb. 27, 2024

Filed:

Jun. 30, 2022

Semiconductor device and method of manufacture

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Wan-Yi Kao, Baoshan Township, TW;

Hung Cheng Lin, Hsinchu, TW;

Che-Hao Chang, Hsinchu, TW;

Yung-Cheng Lu, Hsinchu, TW;

Chi On Chui, Hsinchu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Tong-Ho Kim

Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/49 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66553 (2013.01); H01L 21/02167 (2013.01); H01L 21/02211 (2013.01); H01L 21/0228 (2013.01); H01L 21/02603 (2013.01); H01L 29/0673 (2013.01); H01L 29/42392 (2013.01); H01L 29/4983 (2013.01); H01L 29/66742 (2013.01); H01L 29/78696 (2013.01);
Abstract

Semiconductor devices and methods of manufacturing are presented in which inner spacers for nanostructures are manufactured. In embodiments a dielectric material is deposited for the inner spacer and then treated. The treatment may add material and cause an expansion in volume in order to close any seams that can interfere with subsequent processes.

Find Patent Forward Citations

Kao, Wan-Yi. (2024). Semiconductor device and method of manufacture (U.S. Patent No. 11916132). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11916132

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…