logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11915929 B1

PDFFull Text
Date of Patent:
Feb. 27, 2024

Filed:

Jul. 26, 2022

Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Delphine Longrie, Ghent, BE;

Shaoren Deng, Leuven, BE;

Jan Willem Maes, Wilrijk, BE;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Quoc D Hoang

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02636 (2013.01); H01L 21/0262 (2013.01); H01L 21/0273 (2013.01); H01L 21/32136 (2013.01); H01L 21/32139 (2013.01);
Abstract

Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface are disclosed. The methods may include: contacting the substrate with a plasma generated from a hydrogen containing gas, selectively forming a passivation film from vapor phase reactants on the first dielectric surface while leaving the second metallic surface free from the passivation film, and selectively depositing the target film from vapor phase reactants on the second metallic surface relative to the passivation film.

Find Patent Forward Citations

Longrie, Delphine. (2024). Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface (U.S. Patent No. 11915929). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11915929

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…