The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2024
Filed:
Sep. 27, 2021
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Leonidas Ernesto Ocola, Wappingers Falls, NY (US);
Eric A. Joseph, Croton on Hudson, NY (US);
Hiroyuki Miyazoe, White Plains, NY (US);
Takashi Ando, Eastchester, NY (US);
Damon Brooks Farmer, White Plains, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/40 (2006.01); C23C 16/02 (2006.01); C23C 16/04 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02203 (2013.01); C23C 16/0245 (2013.01); C23C 16/045 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); H01L 21/02178 (2013.01); H01L 21/02181 (2013.01); H01L 29/408 (2013.01);
Abstract
A porous thin film includes a framework that includes a plurality of pores. The pores extend from an opening located at an upper surface of the framework to a bottom surface contained in the framework. A pore-coating film is formed on sidewalls and the bottom surface of the pores.