The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2024

Filed:

Apr. 16, 2020
Applicant:

Fujikin Incorporated, Osaka, JP;

Inventors:

Kaoru Hirata, Osaka, JP;

Keisuke Ideguchi, Osaka, JP;

Shinya Ogawa, Osaka, JP;

Katsuyuki Sugita, Osaka, JP;

Masaaki Nagase, Osaka, JP;

Kouji Nishino, Osaka, JP;

Nobukazu Ikeda, Osaka, JP;

Hiroyuki Ito, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/06 (2006.01); G01L 13/06 (2006.01); G01F 15/00 (2006.01); G01F 1/36 (2006.01); G01L 19/08 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0635 (2013.01); G01F 1/363 (2013.01); G01F 15/005 (2013.01); G01L 13/06 (2013.01); G01L 19/08 (2013.01); Y10T 137/7761 (2015.04);
Abstract

The flow rate control deviceincludes a control valve, a restriction partprovided downstream of the control valve, an upstream pressure sensorfor measuring a pressure Pbetween the control valveand the restriction part, a differential pressure sensorfor measuring a differential pressure ΔP between the upstream and the downstream of the restriction part, and an arithmetic control circuitconnected to the control valve, the upstream pressure sensor, and the differential pressure sensor


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