The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2024

Filed:

Oct. 26, 2020
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Carlos H. Diaz, Los Altos Hills, CA (US);

Mark Van Dal, Linden, BE;

Martin Christopher Holland, Bertem, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/306 (2006.01); H01L 29/04 (2006.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 21/308 (2006.01); H01L 21/265 (2006.01); H01L 29/167 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66636 (2013.01); H01L 21/0243 (2013.01); H01L 21/0245 (2013.01); H01L 21/02381 (2013.01); H01L 21/02433 (2013.01); H01L 21/02538 (2013.01); H01L 21/02639 (2013.01); H01L 21/02658 (2013.01); H01L 21/3083 (2013.01); H01L 21/30604 (2013.01); H01L 21/30608 (2013.01); H01L 29/045 (2013.01); H01L 29/0649 (2013.01); H01L 29/0684 (2013.01); H01L 29/7848 (2013.01); H01L 21/26513 (2013.01); H01L 29/167 (2013.01);
Abstract

A semiconductor structure includes a substrate, a first epitaxial layer, a second epitaxial layer, and a transistor. The substrate includes a first pyramid protrusion, a second pyramid protrusion, a third pyramid protrusion, and a fourth pyramid protrusion. The first and second pyramid protrusions are arranged along a first direction, the second and fourth pyramid protrusions are arranged along the first direction, and the first and third pyramid protrusions are arranged along a second direction crossing the first direction. The first epitaxial layer is over the substrate and in contact with the first, second, third, and fourth pyramid protrusions. The second epitaxial layer is over the first epitaxial layer. The transistor is over the second epitaxial layer.


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