The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2024

Filed:

Mar. 01, 2019
Applicant:

Hitachi Chemical Company, Ltd., Tokyo, JP;

Inventors:

Naoki Tomori, Tokyo, JP;

Tomohiro Nagoya, Tokyo, JP;

Takahiro Kuroda, Tokyo, JP;

Assignee:

RESONAC CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09J 7/29 (2018.01); H01L 23/31 (2006.01); C09J 7/38 (2018.01); H01L 21/56 (2006.01); H01L 23/495 (2006.01); B32B 7/027 (2019.01); C09J 201/02 (2006.01);
U.S. Cl.
CPC ...
H01L 23/3142 (2013.01); B32B 7/027 (2019.01); C09J 7/29 (2018.01); C09J 7/38 (2018.01); H01L 21/561 (2013.01); H01L 23/49579 (2013.01); C09J 201/02 (2013.01);
Abstract

A temporary protective film comprising a support film and an adhesive layer provided on one surface or both surfaces of the support film is disclosed. The coefficient of linear expansion at 30° C. to 200° C. of the temporary protective film may be greater than or equal to 16 ppm/° C. and less than or equal to 20 ppm/° C. in at least one in-plane direction of the temporary protective film.


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