The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2024
Filed:
Apr. 13, 2021
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Johannes Kraus, Theilheim, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/14 (2006.01); G02B 1/02 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G02B 27/14 (2013.01); G02B 1/02 (2013.01); G03F 7/70025 (2013.01); G03F 7/70566 (2013.01); G03F 7/70958 (2013.01);
Abstract
An optical system, in particular for microlithography, includes a beam splitter, which has at least one light entry surface. The beam splitter is arranged in the optical system so that the angles of incidence with respect to the surface normal which occur at the light entry surface during operation of the optical system lie in the range of 45°±5°. The beam splitter is produced in [] the crystal cut.