The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2024
Filed:
Jan. 30, 2018
Applicant:
Fuji Corporation, Chiryu, JP;
Inventors:
Toshiyuki Ikedo, Nagoya, JP;
Takahiro Jindo, Anjo, JP;
Assignee:
FUJI CORPORATION, Chiryu, JP;
Primary Examiner:
Int. Cl.
CPC ...
B23K 10/02 (2006.01); H01J 37/32 (2006.01); H05H 1/34 (2006.01);
U.S. Cl.
CPC ...
B23K 10/02 (2013.01); H01J 37/3244 (2013.01); H05H 1/3423 (2021.05);
Abstract
A practical plasma processing machine is provided, in which attachment mechanism is provided for attaching plasma head to attachment section of a head moving device that moves the plasma head. Since the plasma head can be attached or detached, for example, it is easy to exchange it with a different type of plasma head, remove for maintenance, attaching after maintenance, or the like.