The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Feb. 14, 2023
Entegris, Inc., Billerica, MA (US);
Mark V. Smith, Colorado Springs, CO (US);
Nicholas Thelen, Colorado Springs, CO (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Michael C. Zabka, New Prague, MN (US);
Sung In Moon, Chaska, MN (US);
John P. Puglia, Townsend, MA (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.